Dual-frequencyCapacitivelyCoupledPlasma相关论文
Mass spectrometer investigation of ion energy distribution in dual frequency capacitively coupled ar
In this paper,an energy resolved quadruple mass spectrometer is adopted to investigation ion energy distribution (IED) i......
Dual-frequency capacitively coupled plasmas (DF-CCPs) have attracted the attention of many authors in recent years.DF-CC......
We present the very first experimental evidence of the so-called collisionless electron bounce-resonance-heating (BRH) i......